Extreme Ultraviolet (EUV) Technology Course

Offered by RWTHx

Course Description

Embark on an exciting journey into the cutting-edge world of Extreme Ultraviolet (EUV) technology with this comprehensive course offered by RWTHx. This introductory-level course delves into the fascinating realm of EUV and its pivotal role in shaping the future of computing devices. As the cornerstone of modern semiconductor industry, EUV lithography has revolutionized the production of intricate nanostructures used in integrated circuits, powering the devices we use daily.

What Students Will Learn

  • Understand the working principles, components, and technological challenges of industrial EUV technology
  • Explore the principles and technologies behind EUV radiation generation
  • Grasp basic principles of light propagation and optics
  • Learn about various types and applications of EUV optical components
  • Comprehend the concept and technology of photolithography
  • Discover the intricacies of EUV metrology and its applications

Prerequisites

This course is designed for beginners and requires no prior knowledge or specific skills. Anyone with a keen interest in cutting-edge technology and its applications in the semiconductor industry can enroll and benefit from this course.

Course Coverage

  • Introduction to EUV technology and its significance in the semiconductor industry
  • Fundamentals of EUV radiation and its generation
  • Principles of optics and light propagation
  • EUV optical components and systems
  • Photolithography techniques, with a focus on EUV projection lithography
  • EUV metrology and its applications in nanofabrication
  • Interdisciplinary research driving EUV technology advancements
  • Real-world applications and future prospects of EUV technology

Who This Course Is For

  • Students interested in nanotechnology, physics, and engineering
  • Professionals in the semiconductor industry seeking to expand their knowledge
  • Technology enthusiasts curious about the latest advancements in computing devices
  • Anyone looking to understand the future of nanofabrication and integrated circuits

Real-World Applications

  • Career advancement in the semiconductor industry
  • Research and development in nanofabrication and nanometrology
  • Innovation in computer hardware and integrated circuit design
  • Understanding and predicting future trends in technology and computing
  • Applying EUV concepts to other fields requiring precise nanometer-scale structures

Syllabus

Week 1: Introduction to EUV technology and basic principles of EUV optics
Week 2: EUV radiation generation and properties, major source types and their applications
Week 3: Fundamentals of optics with emphasis on EUV optical systems
Week 4: Major optical components in EUV systems
Week 5: Photolithography principles, history, and current EUV projection lithography systems
Week 6: EUV metrology principles and applications

By enrolling in this course, you'll gain invaluable insights into one of the most important technologies of the 21st century. Join us on this fascinating journey to explore the limits of nanostructuring and nanometrology, and become part of the next generation of innovators in the semiconductor industry and beyond.